3. 강의목표
Advanced discussion of micromachining processes used to construct MEMS. Coverage of many lithographic, deposition, and etching processes, as well as their combination in process integration. Materials issues such as chemical resistance, corrosion, mechanical properties, and residual/intrinsic stress. Studies of state-of-the-art MEMS research area and applications in various engineering fields. Basic science issues in micro domain including micro fluid science, mechanical behavior of microstructures, surface tension, etc.
5. 성적평가
HW: 30%, Term paper: 70% (50%: presentations, 20%: final paper)
7. 참고문헌 및 자료
Hand-outs
Fundamentals of Microfabrication, 2nd Ed., MadouIntroduction to Microelectronic Fabrication, Richard C. JaegerMicromachined Transducers Source Book, Gregory T.A. KovacsMEMS related conference proceedings (e.g., MEMS, Transducers etc.)
8. 강의진도계획
Review of MEMS fabrication. Material consideration for MEMS. Microscale: Nature and size, Proportions and size, On being small, Mechanical issues of MEMS structures. Advanced lithography. High-Aspect-Ratio Micromachining.
Electrochemical processes (deposition, etching). Assembly and shape/surface modification. Bonding & Packaging. Surface tension: Theory, Applications. Advanced bulk micromachining. Fabrication of microchannels. Fabrication of other 3D microstructures.
Discussion on recent MEMS research activities.
9. 수업운영
Grade only (No S/U)
On-line lecture (real time)
10. 학습법 소개 및 기타사항
In class lecture
11. 장애학생에 대한 학습지원 사항
- 수강 관련: 문자 통역(청각), 교과목 보조(발달), 노트필기(전 유형) 등
- 시험 관련: 시험시간 연장(필요시 전 유형), 시험지 확대 복사(시각) 등
- 기타 추가 요청사항 발생 시 장애학생지원센터(279-2434)로 요청