1. Understand fundamental material science and solid state physics, and apply the obtained knowledge to the study of nanoscale science and engineering
2. Understand the fundamental concepts in the design, fabrication, manufacturing, characterization and application of various nanoscale materials and structures
3. Develop the skill to top-down and bottom-up approach of nanoscale fabrication and manufacturing methodology

Graduate level in Engineering or Science or Undergraduate with solid background in nanoscience
Required: MECH403, CHEB463 or closely related courses such as micro/nanofabrication

Attendance and participation 50%
Term project presentation and reports 50%

Fundamentals of Microfabrication, Marc J. Madou
Nanofabrication: Primciples and Applications, Christo Papadopoulos

Week 1 : Nanofabrication overview (2 lectures)
Week 2 : Photo-lithography (2 lectures)
Week 3 : Photo-lithography (1 lecture)
Week 4 : Photo-lithography (1 lecture) / EUV lithography (1 lecture)
Week 5 : X-ray lithography (1 lecture) / Term project proposal (5mins presentation for each student)
Week 6 : X-ray lithography (1 lecture)
Week 7 : Electron-beam lithography (2 lectures)
Week 8 : Focused ion-beam lithography (2 lectures)
Week 9 : Focused ion-beam lithography (2 lectures)
Week 10 : Nanoimprint lithography (2 lectures)
Week 11 : Nanoimprint lithography (1 lecture) / Scanning probe lithography (1 lecture)
Week 12 : Scanning probe lithography (1 lecture) / Soft lithography (1 lecture)
Week 13 : Self-assembly (2 lectures)
Week 14 : Term project presentation (15mins presentation for each student)
Week 15 : Term project presentation (15mins presentation for each student)
Week 16 : Final week (no class)

Recorded video lecture (non-live)

COMSOL Multiphysics를 이용해 산업체에서 사용하는 다양한 광구조체들(렌즈, 컬러필터 등)을 미리 설계 해 보는 경험을 본 강의에서 제공할 계획임