 To provide a foundational understanding of MEMS (Microelectromechanical Systems) fabrication processes and theoretical principles, based on basic semiconductor integrated circuit fabrication (microfabrication technology).
 To study practical MEMS devices, including various microsensors and actuators, and understand their working principles and applications.
 To explore the interdisciplinary applicability of MEMS technology in diverse fields such as mechanical engineering, electrical engineering, materials science, physics, and biotechnology.

출석 및 Homework: 20%, Midterm exam: 25%, Final exam: 35%, Term project: 20%

Lecture Notes
Semiconductor Manufacturing Technology, Michael Quirk/Julian Serda, Prentice Hall, 2001.
Micromachined Transducers: Sourcebook, Gregory T.A. Kovacs, McGraw-Hill, 1998.
Fundamentals of Microfabrication, 2nd Ed., Marc Madou, CRC Press, 1997.
Introduction to Microelectronic fabrication, 2nd Ed., Richard C. Jaeger, Prentice Hall, 2001.

주 내용
1 Introduction to MEMS, History and the important papers
2 Phenomena in micro-scale world
3 Photolithography
4 Surface micromachining
5 Surface micromachining
6 Bulk micromachining
7 Bulk micromachining
8 Midterm & Term project proposal
9 LIGA process
10 MEMS packaging
11 MEMS applications
12 MEMS applications
13 MEMS applications
14 Nanofabrication overview
15 Term project presentation
16 Final exam

In class lecture