3. 강의목표
This course aims to provide the student of the broad overview of the thin film technology. The basic knowledge as well as the practical aspects of the fabrication and the characterization of the thin film will be covered. Specifically, topics such as vacuum engineering (pumps and gauges), deposition methods, thin film growth mechanism, characterization methods as well as applications of thin films will be discussed in the class. More specifically, the real-world examples in the semiconductor industry will be further discussed.
4. 강의선수/수강필수사항
Taking an introductory class on materials science and engineering (undergraduate level) is recommended, but not mandatory.
5. 성적평가
| 중간고사 |
기말고사 |
출석 |
과제 |
프로젝트 |
발표/토론 |
실험/실습 |
퀴즈 |
기타 |
계 |
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| 비고 |
Midterm exam 50%, Final presentation 50%
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7. 참고문헌 및 자료
Materials Science of Thin Films (2nd edition), M. Ohring, Academic Press (2006)
박막공학의 기초, 김진섭 외, 일진사 (2007)
8. 강의진도계획
Week 1 : Introduction to vacuum and thin films
Week 2 : Vacuum engineering 1
Week 3 : Vacuum engineering 2
Week 4 : Plasma engineering
Week 5 : Thin film growth theory 1
Week 6 : Thin film growth theory 2
Week 7 : Nano-characterization
Week 8 : Midterm exam
Week 9 : Vacuum thin film deposition – case study 1: sputtering
Week 10 : Vacuum thin film deposition – case study 2: CVD
Week 11 : Vacuum thin film deposition – case study 3-1: ALD fundamentals
Week 12 : Vacuum thin film deposition – case study 3-2: ALD applications
Week 13 : Final presentation 1 - Real examples in semiconductor applications
Week 14 : Final presentation 2 - Real examples in energy applications
Week 15 : Final presentation 3 - Real examples in emerging applications
11. 장애학생에 대한 학습지원 사항
- 수강 관련: 문자 통역(청각), 교과목 보조(발달), 노트필기(전 유형) 등
- 시험 관련: 시험시간 연장(필요시 전 유형), 시험지 확대 복사(시각) 등
- 기타 추가 요청사항 발생 시 장애학생지원센터(279-2434)로 요청