3. 강의목표
To provide a foundational understanding of MEMS (Microelectromechanical Systems) fabrication processes and theoretical principles, based on basic semiconductor integrated circuit fabrication (microfabrication technology).
To study practical MEMS devices, including various microsensors and actuators, and understand their working principles and applications.
To explore the interdisciplinary applicability of MEMS technology in diverse fields such as mechanical engineering, electrical engineering, materials science, physics, and biotechnology.
5. 성적평가
| 중간고사 |
기말고사 |
출석 |
과제 |
프로젝트 |
발표/토론 |
실험/실습 |
퀴즈 |
기타 |
계 |
| 25 |
35 |
|
20 |
20 |
|
|
|
|
100 |
| 비고 |
출석 및 Homework: 20%, Midterm exam: 25%, Final exam: 35%, Term project: 20%
|
7. 참고문헌 및 자료
Lecture Notes
Semiconductor Manufacturing Technology, Michael Quirk/Julian Serda, Prentice Hall, 2001.
Micromachined Transducers: Sourcebook, Gregory T.A. Kovacs, McGraw-Hill, 1998.
Fundamentals of Microfabrication, 2nd Ed., Marc Madou, CRC Press, 1997.
Introduction to Microelectronic fabrication, 2nd Ed., Richard C. Jaeger, Prentice Hall, 2001.
8. 강의진도계획
주 내용
1 Introduction to MEMS, History and the important papers
2 Phenomena in micro-scale world
3 Photolithography
4 Surface micromachining
5 Surface micromachining
6 Bulk micromachining
7 Bulk micromachining
8 Midterm & Term project proposal
9 LIGA process
10 MEMS packaging
11 MEMS applications
12 MEMS applications
13 MEMS applications
14 Nanofabrication overview
15 Term project presentation
16 Final exam
10. 학습법 소개 및 기타사항
In class lecture
11. 장애학생에 대한 학습지원 사항
- 수강 관련: 문자 통역(청각), 교과목 보조(발달), 노트필기(전 유형) 등
- 시험 관련: 시험시간 연장(필요시 전 유형), 시험지 확대 복사(시각) 등
- 기타 추가 요청사항 발생 시 장애학생지원센터(279-2434)로 요청